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PSA nitrogen generator for electronics cleanrooms

Our PSA nitrogen generator for electronics cleanrooms delivers ultra-high-purity nitrogen (99.9999%) essential for maintaining Class 1 to Class 100,000 cleanroom environments. It uses advanced carbon molecular sieve technology combined with catalytic oxidation beds to remove trace impurities, hydrocarbons, and particulates. The generator undergoes rigorous cleaning and testing to meet ISO standards for cleanroom-compatible equipment. It includes HEPA filtration and optional ionizers to prevent contamination. The system’s quiet operation and minimal footprint make it suitable for cleanroom installations. It supports nitrogen purging of process tools, glove boxes, and storage chambers.

PSA nitrogen generator for electronics cleanrooms

Electronics manufacturers can safeguard their cleanroom processes using our nitrogen generator. Ultra-pure nitrogen prevents oxidation of silicon wafers, photoresist degradation, and particulate contamination during photolithography and etching. The generator’s reliability ensures consistent gas supply, avoiding production halts due to gas purity issues. Its cleanroom-certified design prevents introduction of contaminants from the nitrogen generation process itself. Customers receive a system validated for their specific cleanroom class, with remote monitoring capabilities to integrate with facility management systems. Comprehensive qualification and validation support meet stringent regulatory requirements.

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